Title: AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface

Citation
Brousseau E, Geng Y (2018). AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface. Cardiff University. http://doi.org/10.17035/d.2017.0040949516


This data is not currently available because: Intent to publish project results
Access Method: Click to email a request for this data to opendata@cardiff.ac.uk

Cardiff University Dataset Creators

Dataset Details
Publisher: Cardiff University
Date (year) of data becoming publicly available: 2018
Coverage start date: 01/09/2016
Coverage end date: 31/03/2017
Data format: xlsx, tiff
Software Required: Excel for xlsx files and Gwyddion (free software -> Gwyddion.net) for tiff files
Estimated total storage size of dataset: Less than 100 megabytes
Number of Files In Dataset: 11
DOI: 10.17035/d.2017.0040949516

Description

This is the complete dataset for a study which aimed to enhance the throughput of the Atomic Force Microscopy (AFM) tip-based nanomachining process by increasing the cutting speed at the interface between the tool and the workpiece. A modified AFM set-up was implemented, which combined the fast reciprocating motions of a piezoelectric actuator, on which a PMMA workpiece was mounted, and the linear displacement of the AFM stage, which defined the length of produced grooves.

The dataset comprises a number of related data sub-set as follows:

1) Measured amplitude of a piezoelectric actuator (model NAC2402-H2.3, Noliac, Denmark) reciprocating motions as a function of the driving frequency for an input peak-to-peak voltage of 225 V.

2) Measured groove depth, height of the pile-up on both sides of a groove and groove width as a function of the frequency utilsed to machine the grooves.

3) AFM images of machined grooves with frequencies of 10 Hz, 10 kHz and 40 kHz for a stage velocity of 100 μm/s along the ‘edge-forward’ feed direction.

4) Profiles of the groove cross-sections shown with sub-set (3) above.

5) Scanning electron microscopy images of the grooves shown with sub-set (3) above.

6) Measured groove depth, height of the pile-up on both sides of a groove and groove width as a function of the frequency of the piezoelectric actuator and the feed direction.

7) AFM images of machined grooves with different feed directions for a stage velocity of 100 μm/s and a frequency of 10 kHz.

8) Profiles of the groove cross-sections shown with sub-set (7) above.

9) Scanning electron microscopy images of the grooves shown with sub-set (7) above.

10) Evolution of the voltage signals (both before and after filtering) along the vertical and horizontal axes of the Position Sensitive Photo Diode (PSPD) and stage displacement signal for different feed directions for a stage velocity of 100 μm/s and a frequency of 10 kHz.

11) Measured groove depth, height of pile-up on both sides of a groove and width as a function of the feed value utilised.

12) AFM images of machined grooves with different feed values for the ‘edge-forward’ configuration and a frequency of 10 kHz.

13) Profiles of the groove cross-sections shown with sub-set (12) above.

14) Scanning electron microscopy images of the grooves shown with sub-set (12) above.


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Last updated on 2017-06-10 at 14:56