Title: Diamond on GaN/III-N membrane thermal stress characterisation data

Cuenca J, Mandal S, Williams O (2021). Diamond on GaN/III-N membrane thermal stress characterisation data. Cardiff University. http://doi.org/10.17035/d.2020.0122916115

Access Rights: Data is provided under a Creative Commons Attribution (CC BY 4.0) licence
Access Method: Click to email a request for this data to opendata@cardiff.ac.uk

Cardiff University Dataset Creators

Dataset Details
Publisher: Cardiff University
Date (year) of data becoming publicly available: 2021
Coverage start date: 30/11/2020
Coverage end date: 04/12/2020
Data format: xlsx, png, pdf
Estimated total storage size of dataset: Less than 100 megabytes
DOI: 10.17035/d.2020.0122916115


The dataset contains characterisation of chemical vapour deposited (CVD) diamond on gallium nitride/III-nitride (GaN/III-N) membranes.

Characterisation includes:

  • Surface Profilometry data using a BRUKER DEKTAK profilometer of the 0.5, 2.0 and 5 mm diameter membranes. Profilometry data is given for before and after CVD diamond is deposited on the III-N side of the GaN/III-N membrane in 2 directions orthogonal to one another.
  • Raman spectroscopy of the 0.5 and 2.0 mm membranes at different locations and stages during the fabrication process. Screenshot data is also given for the 5.0 mm membrane which was destroyed, as detailed in the study.
  • Energy-dispersive X-ray spectroscopy (EDX) data and high angle annular dark field scanning transmission electron microscopy (HAADF-STEM) of the 0.5 mm membrane. The EDX data gives atomic ratios of carbon, aluminium, gallium, nitrogen, silicon and oxygen.

Research results based upon these data are published at http://doi.org/10.1016/j.carbon.2020.11.067

Research Areas

Related Projects
GaN on diamond (01/12/2016 - 31/12/2021)

Last updated on 2021-19-04 at 10:10