Establishment and technology transfer of special metal-containing molecule synthesis that is used for ultra-thin film deposition technology in semiconductor fabrication - CONVERIS Research Information System by Thomson Reuters:

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Title: Establishment and technology transfer of special metal-containing molecule synthesis that is used for ultra-thin film deposition technology in semiconductor fabrication

Funder
Tokyo Ohka-Kogyo Co Ltd

Principal Investigator

Melen, Rebecca

Co-Investigators
Roldan Martinez, Alberto

Project Details

Net value award figure for Cardiff University: £179,074.00

Start date: 01/10/2020

End date: 31/03/2024

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